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Emergence of very broad infrared absorption band by hyperdoping of silicon with chalcogens

Umezu, Ikurou; Warrender, Jeffrey M.; Charnvanichborikarn, Supakit; Kohno, Atsushi; Williams, James S.; Tabbal, Malek; Papazoglou, Dimitris G.; Zhang, Xi-Cheng; Aziz, Michael J.


We report the near through mid-infrared (MIR) optical absorption spectra, over the range 0.05–1.3 eV, of monocrystalline silicon layers hyperdoped with chalcogen atoms synthesized by ion implantation followed by pulsed laser melting. A broad mid-infrared optical absorption band emerges, peaking near 0.5 eV for sulfur and selenium and 0.3 eV for tellurium hyperdoped samples. Its strength and width increase with impurity concentration. Its strength decreases markedly with subsequent thermal...[Show more]

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.4804935


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