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Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures

Kluth, S. M.; Álvarez, D.; Trellenkamp, St.; Moers, J.; Mantl, S.; Kretz, J.; Vandervorst, W.


B implants of 1keV, 1×10¹⁵⁻² into 125-nm-wide, free-standing Si nanostructures have been characterized using scanning spreading resistancemicroscopy following a 0s, 1050°Canneal in N₂. A curved diffusion front has been observed. B in the center of the ridge diffuses further than at the sides. A similar effect has been observed in SUPREM-IV simulations. It is attributed to a reduction in transient enhanced diffusion close to the vertical surfaces due to recombination of...[Show more]

CollectionsANU Research Publications
Date published: 2004-12-28
Type: Journal article
Source: Journal of Vacuum Science & Technology B
DOI: 10.1116/1.1839898


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