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The mechanical properties of energetically deposited non-crystalline carbon thin films

Kracica, M.; Kocer, C.; Lau, D. W. M.; Partridge, J. G.; Bradby, Jodie; Haberl, Bianca; McKenzie, D. R.; McCulloch, D. G.


The mechanical behaviour of carbon films prepared with a variety of densities and microstructures was investigated using nanoindentation. Deposition energies between 25 and 600 eV and temperatures in the range 25�600 �C were used. Films prepared at low temperatures and moderate energies were amorphous with a high density. Finite element methods were used to model the stress fields, reproduce the indentation behaviour and evaluate elastic properties. Young's moduli up to 670 GPa and a low...[Show more]

CollectionsANU Research Publications
Date published: 2016
Type: Journal article
Source: Carbon
DOI: 10.1016/j.carbon.2015.10.085


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