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In situ spectroscopic study of the plastic deformation of amorphous silicon under non-hydrostatic conditions induced by indentation

Gerbig, Y. B.; Bradby, Jodie; Haberl, Bianca; Cook, R. F.; Michaels, C. A.

Description

Indentation-induced plastic deformation of amorphous silicon (a-Si) thin films was studied by in situ Raman imaging of the deformed contact region of an indented sample, employing a Raman spectroscopy-enhanced instrumented indentation technique. Quantitative analyses of the generated in situ Raman maps provide unique, new insight into the phase behavior of as-implanted a-Si. In particular, the occurrence and evolving spatial distribution of changes in the a-Si structure caused by processes,...[Show more]

CollectionsANU Research Publications
Date published: 2015-12
Type: Journal article
URI: http://hdl.handle.net/1885/155078
Source: Physical review. B, Condensed matter and materials physics
DOI: 10.1103/PhysRevB.92.214110
Access Rights: Open Access

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