Minimax LQG controller design for nanopositioners
A design and experimental implementation of a minimax linear-quadratic-Gaussian (LQG) controller to damp the resonant modes of a piezoelectric tube scanner (PTS) used in most commercial atomic force microscopes is presented in this paper. The controller design is presented to account two uncertainties in the system which arises due to (a) the spill over dynamics of the PTS at high frequencies and (b) changes in resonance frequency of the scanner which occur due to the various loads on the...[Show more]
|Collections||ANU Research Publications|
|Source:||European Control Conference, ECC 2009|
|Access Rights:||Open Access|
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