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Effect of Electrode Roughness on Electroforming in HfO2 and Defect-Induced Moderation of Electric-Field Enhancement

Nandi, Sanjoy; Liu, Xinjun; Venkatachalam, Dinesh; Elliman, Robert

Description

The roughness of Pt electrodes is shown to have a direct impact on the electroforming characteristics of Pt=Ti=HfO2=Pt device structures. Specifically, an increase in roughness leads to a reduction in the electroforming voltage of HfO2, an increase in the failure rate of devices, and a corresponding reduction in resistive switching reliability. A finite-element model is used to investigate the significance of local electricfield enhancement on the breakdown process. This simulation shows that...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
URI: http://hdl.handle.net/1885/153864
Source: Physical Review Applied
DOI: 10.1103/PhysRevApplied.4.064010
Access Rights: Open Access

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