Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna
Download (436.6 kB)
-
Altmetric Citations
Charles, C.; Boswell, R. W.; Lieberman, M. A.
Description
A radio frequency (rf) plasma is created at low pressure (∼1 mTorr) in the source tube of a “helicon” excited diffusion system in the absence of a dc magnetic field. The coupling is capacitive for the low source power of 160 W at 13.56 MHz considered here. Temperature measurements of the glass source tube yield a plasma power deposition of ∼35 W. The plasma parameters (density, potential, electron temperature) were measured using a retarding field energy analyzer. An analytical model based on...[Show more]
Collections | ANU Research Publications |
---|---|
Date published: | 2003-02-19 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/15351 |
Source: | Physics of Plasmas |
DOI: | 10.1063/1.1555058 |
Download
File | Description | Size | Format | Image |
---|---|---|---|---|
Charles et al Energy Balance in a Low Pressure 2003.pdf | 436.6 kB | Adobe PDF |
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.
Updated: 17 November 2022/ Responsible Officer: University Librarian/ Page Contact: Library Systems & Web Coordinator