Skip navigation
Skip navigation

Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna

Charles, C.; Boswell, R. W.; Lieberman, M. A.

Description

A radio frequency (rf) plasma is created at low pressure (∼1 mTorr) in the source tube of a “helicon” excited diffusion system in the absence of a dc magnetic field. The coupling is capacitive for the low source power of 160 W at 13.56 MHz considered here. Temperature measurements of the glass source tube yield a plasma power deposition of ∼35 W. The plasma parameters (density, potential, electron temperature) were measured using a retarding field energy analyzer. An analytical model based on...[Show more]

CollectionsANU Research Publications
Date published: 2003-02-19
Type: Journal article
URI: http://hdl.handle.net/1885/15351
Source: Physics of Plasmas
DOI: 10.1063/1.1555058

Download

File Description SizeFormat Image
Charles et al Energy Balance in a Low Pressure 2003.pdf436.6 kBAdobe PDFThumbnail


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  12 November 2018/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator