Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna
A radio frequency (rf) plasma is created at low pressure (∼1 mTorr) in the source tube of a “helicon” excited diffusion system in the absence of a dc magnetic field. The coupling is capacitive for the low source power of 160 W at 13.56 MHz considered here. Temperature measurements of the glass source tube yield a plasma power deposition of ∼35 W. The plasma parameters (density, potential, electron temperature) were measured using a retarding field energy analyzer. An analytical model based on...[Show more]
|Collections||ANU Research Publications|
|Source:||Physics of Plasmas|
|Charles et al Energy Balance in a Low Pressure 2003.pdf||436.6 kB||Adobe PDF|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.