Breakdown behavior in radio-frequency argon discharges
The minimum voltage required to break down a dischargeVbrk has long been known to be a strong function of the product of the neutral gas pressure and the electrode separation (pd). This paper investigates the dependence of Vbrk on pd in radio-frequency (rf) systems using experimental, computational and analytic techniques. Experimental measurements of Vbrk in an argon discharge are made for pressures in the range 1–500 mTorr and electrode separations of 2–20 cm. A particle-in-cell simulation is...[Show more]
|Collections||ANU Research Publications|
|Source:||Physics of Plasmas|
|Smith et al Breakdown Behavior in Radio Frequency 2003.pdf||392 kB||Adobe PDF|
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