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Breakdown behavior in radio-frequency argon discharges

Smith, H. B.; Charles, C.; Boswell, R. W.


The minimum voltage required to break down a dischargeVbrk has long been known to be a strong function of the product of the neutral gas pressure and the electrode separation (pd). This paper investigates the dependence of Vbrk on pd in radio-frequency (rf) systems using experimental, computational and analytic techniques. Experimental measurements of Vbrk in an argon discharge are made for pressures in the range 1–500 mTorr and electrode separations of 2–20 cm. A particle-in-cell simulation is...[Show more]

CollectionsANU Research Publications
Date published: 2003-02-19
Type: Journal article
Source: Physics of Plasmas
DOI: 10.1063/1.1531615


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