Perry, Andrew; Conway, Garrard; Boswell, Rod; Persing, Harold
As the input rf power to a helicon plasma is increased there is a discontinuous increase in the density which is identified with a change from a capacitive to an inductive/wave coupling to the plasma. The radial distribution of the density is much narrower in the inductive (high) mode than in the capacitive (low) mode. Although the time average plasma potential (Vp) decreases markedly at this mode change, the radial profile of Vp is flat in both modes. Measurements with an emissive probe show...[Show more]
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