Highly transparent and highly passivating Silicon nitride for solar cells
This thesis concerns the optimisation and application of Silicon nitride (SiNx) films for silicon solar cells. Systematic and comprehensive studies of SiNx properties are undertaken to advance (i) the technology of SiNx synthesised by plasma enhanced chemical vapour deposition (PECVD), and (ii) the understanding of recombination at SiNx-passivated silicon surfaces. We examine the film properties of SiNx prepared by a microwave/radio-frequency dual-mode PECVD reactor. It is shown that there is...[Show more]
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