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Investigation of a Magnetically Enhanced Inductively Coupled Negative Ion Plasma Source

Nulty, Stuart

Description

Experiments and numerical models were used to investigate an inductively coupled plasma source (ICPS) operating with a magnetic filter field. The work shows that applying magnetic filters transversely to the plasma offers several new control parameters to help enhance the properties of a plasma source. The application of these new results using magnetic enhancement is discussed with respect to both industrial plasma fabrication processes and neutral beam...[Show more]

CollectionsOpen Access Theses
Date published: 2018
Type: Thesis (PhD)
URI: http://hdl.handle.net/1885/148842
DOI: 10.25911/5d611ed64b1f3

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