Fabrication of submicron structures by three-dimensional laser lithography
As a demonstration of unique capabilities of three dimensional laser lithography, an example complex shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.
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|Shishkin et al Fabrication of submicron structures 2014.pdf||944.3 kB||Adobe PDF|
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