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Fabrication of submicron structures by three-dimensional laser lithography

Shishkin, I. I.; Rybin, M. V.; Samusev, K. B.; Limonov, M. F.; Kiyan, R. V.; Chichkov, B. N.; Kivshar, Yuri S.; Belov, P. A.


As a demonstration of unique capabilities of three dimensional laser lithography, an example complex shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

CollectionsANU Research Publications
Date published: 2014-07
Type: Journal article
Source: JETP Letters
DOI: 10.1134/S0021364014090112


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