Open Research

SIMS and ESD studies of semiconductor structures

dc.contributor.author	Petravi{u0107}, Mladen
dc.date.accessioned	2017-12-21T04:02:00Z
dc.date.available	2017-12-21T04:02:00Z
dc.date.copyright	1992
dc.identifier.other	b1826195
dc.identifier.uri	http://hdl.handle.net/1885/138819
dc.format.extent	171 leaves
dc.subject.lcsh	Semiconductors
dc.subject.lcsh	Secondary ion mass spectrometry
dc.subject.lcsh	Electron-stimulated desorption
dc.subject.lcsh	Thin films
dc.title	SIMS and ESD studies of semiconductor structures
dc.type	Thesis (PhD)
local.description.notes	Thesis (Ph.D.)--Australian National University, 1992
dc.date.issued	1992
local.identifier.doi	10.25911/5d6c39bc107b1
dc.date.updated	2017-12-11T01:00:17Z
dcterms.license	This thesis has been made available through exception 200AB to the Copyright Act.
local.mintdoi	mint
Collections	Open Access Theses

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