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SIMS and ESD studies of semiconductor structures

dc.contributor.authorPetravi{u0107}, Mladen
dc.date.accessioned2017-12-21T04:02:00Z
dc.date.available2017-12-21T04:02:00Z
dc.date.copyright1992
dc.date.created1992
dc.identifier.otherb1826195
dc.identifier.urihttp://hdl.handle.net/1885/138819
dc.format.extent171 leaves
dc.subject.lcshSemiconductors
dc.subject.lcshSecondary ion mass spectrometry
dc.subject.lcshElectron-stimulated desorption
dc.subject.lcshThin films
dc.titleSIMS and ESD studies of semiconductor structures
dc.typeThesis (PhD)
local.description.notesThesis (Ph.D.)--Australian National University, 1992
local.identifier.doi10.25911/5d6c39bc107b1
dc.date.updated2017-12-11T01:00:17Z
dcterms.licenseThis thesis has been made available through exception 200AB to the Copyright Act.
local.mintdoimint
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