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Impact of grown-in point-defects on the minority carrier lifetime in Czochralski-grown silicon wafers

Rougieux, F. E.; Grant, N. E.; Macdonald, D.


In this study, we investigate the nature of some recombination active defects limiting the lifetime in Czochralski (CZ) silicon wafers, in the millisecond range. Due to their low concentrations, the observed defects are unlikely to be identified through Deep-Level Transient Spectroscopy (DLTS) or Electron Paramagnetic Resonance (EPR), hence we use lifetime spectroscopy combine with several annealing steps to help identify the defect. We demonstrate that the defect can be deactivated by...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: Energy Procedia
DOI: 10.1016/j.egypro.2014.12.346


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