Xu, Lujia; Hameiri, Ziv; Weber, Klaus; Yang, Xinbo
Laser doping of crystalline silicon has been the subject of intense research over the past decade, due to its potential to enable the
fabrication of high efficiency and low-cost crystalline silicon solar cells. Information regarding the doping profile created by the
process is critical for process optimisation, however is generally difficult to obtain. In this paper, a relatively new technique for
characterising laser doping cross-sections — Secondary Electron Microscopy Dopant Contrast...[Show more]
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