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Comparison between Secondary Electron Microscopy Dopant Contrast Image (SEMDCI) and Electron Beam Induced Current (EBIC) for laser doping of crystalline silicon

Xu, Lujia; Hameiri, Ziv; Weber, Klaus; Yang, Xinbo


Laser doping of crystalline silicon has been the subject of intense research over the past decade, due to its potential to enable the fabrication of high efficiency and low-cost crystalline silicon solar cells. Information regarding the doping profile created by the process is critical for process optimisation, however is generally difficult to obtain. In this paper, a relatively new technique for characterising laser doping cross-sections — Secondary Electron Microscopy Dopant Contrast...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: Energy Procedia
DOI: 10.1016/j.egypro.2014.08.112


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