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Comparison between Secondary Electron Microscopy Dopant Contrast Image (SEMDCI) and Electron Beam Induced Current (EBIC) for laser doping of crystalline silicon

Xu, Lujia; Hameiri, Ziv; Weber, Klaus; Yang, Xinbo

Description

Laser doping of crystalline silicon has been the subject of intense research over the past decade, due to its potential to enable the fabrication of high efficiency and low-cost crystalline silicon solar cells. Information regarding the doping profile created by the process is critical for process optimisation, however is generally difficult to obtain. In this paper, a relatively new technique for characterising laser doping cross-sections — Secondary Electron Microscopy Dopant Contrast...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
URI: http://hdl.handle.net/1885/13603
Source: Energy Procedia
DOI: 10.1016/j.egypro.2014.08.112

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