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Sputtered hydrogenated amorphous silicon for silicon heterojunction solar cell fabrication

Zhang, Xinyu; Cuevas, Andres; Demaurex, Bénédicte; De Wolf, Stefaan


This work shows that RF sputter-deposited hydrogenated amorphous silicon (a-Si:H) films are very effective in passivating silicon surfaces. We have previously found that sputter-deposited 45 nm thick intrinsic a-Si:H provides outstanding surface passivation on n-type silicon, similar to that achieved by ‘classic’ plasma enhanced chemical vapour deposition [1]. In this paper, we show that p-type silicon surfaces can be well passivated as well, achieving effective carrier lifetimes of 1.1 ms...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: Energy Procedia
DOI: 10.1016/j.egypro.2014.08.070


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