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Nanoindentation of Silicon and Germanium

Kiran, M.S.R.N.; Haberl, Bianca; Bradby, J.E.; Williams, J.S.


Nanoindentation of silicon and germanium is of interest not only for the measurement of their mechanical properties but more importantly for the fact that they undergo a series of phase transformations under applied pressure. Indeed, after complete pressure release, the material does not return to the starting diamond cubic phase, but several metastable phases are possible, depending on the indentation conditions. In silicon, both crystalline (diamond cubic) and amorphous phases undergo a phase...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
Source: Semiconductors and Semimetals
DOI: 10.1016/bs.semsem.2014.12.002


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