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Hydrogen evolution and transport in semiconductors

Pyke, Daniel James


Silicon-on-insulator structures are used for the fabrication of integrated electronic circuits, photonic devices and structures, and micro-electro-mechanical systems. The most common fabrication method for SOI is a hydrogen-induced cleavage technique in which ion-implanted hydrogen is employed to initiate and propagate cracks in a plane parallel to the silicon surface. Considerable research effort has been devoted to understanding this cleavage technique in (100) silicon but several fundamental...[Show more]

CollectionsOpen Access Theses
Date published: 2014
Type: Thesis (PhD)
DOI: 10.25911/5d51458c7bfe2
Access Rights: Open Access


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