Study the structural properties of Ge nanoparticles formed by ion implantation and thermal annealing in nitride-base dielectric matrices
This thesis investigates the formation of Ge nanoparticles (NPs) in amorphous Si3N4 and SiOxNy by ion implantation and thermal annealing. The structural properties of the NPs were determined using a combination of laboratory and synchrotron based techniques including cross-section transmission electron microscopy (TEM), x-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS), Raman spectroscopy measurements and x-ray absorption spectroscopy...[Show more]
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