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Experimental study of expanding hollow cathode discharges

Dixon, Samuel Arthur Lazar

Description

This thesis details work performed in the Distributed Array Shower Head (DASH) and Pocket Rocket systems over the past three years, and is targeted at use in surface processing applications. The DASH source produces plasma in an array of hollow cathodes. Pocket Rocket is a geometrically similar analogue to a single hollow cathode in the DASH source, used for its superior optical access. The work aims to investigate the physics that underpins the operation of such a plasma source. To...[Show more]

CollectionsOpen Access Theses
Date published: 2014-07
Type: Thesis (PhD)
URI: http://hdl.handle.net/1885/109315

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