High Q factor chalcogenide ring resonators for cavity-enhanced MIR spectroscopic sensing
We report the characteristics of high Q factor chalcogenide ring resonators designed for sensing in the mid-infrared (MIR). The resonators consisted of an exposed Ge11.5As24Se64.5core on a Ge11.5As24S64.5 bottom cladding and were fabricated in the racetrack coupled ring structure. Loaded Q factors at 5.2μm up to 58,000were obtained, corresponding to an intrinsic Q of 145,000 and a waveguide propagation loss of 0.84dB/cm.
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