Interpolating the optical properties of varied composition silicon nitride
We develop a method for interpolating the optical properties of silicon nitride formed with different deposition parameters. Published refractive index measurements for eight silicon nitride films formed by in-line microwave plasma-enhanced chemical-vapour deposition with a range of ammonia to silane gas-flow ratios are modelled and interpolated. The measurements are fitted by a physical model for the optical properties of silicon nitride. The model considers 16 different silicon-centred,...[Show more]
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|Source:||Physica Status Solidi. B: Basic Research|
|01_Thomson_Interpolating_the_optical_2015.pdf||514.62 kB||Adobe PDF||Request a copy|
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