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Interpolating the optical properties of varied composition silicon nitride

Thomson, Andrew; Lal, Niraj; Wan, Yimao

Description

We develop a method for interpolating the optical properties of silicon nitride formed with different deposition parameters. Published refractive index measurements for eight silicon nitride films formed by in-line microwave plasma-enhanced chemical-vapour deposition with a range of ammonia to silane gas-flow ratios are modelled and interpolated. The measurements are fitted by a physical model for the optical properties of silicon nitride. The model considers 16 different silicon-centred,...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
URI: http://hdl.handle.net/1885/103617
Source: Physica Status Solidi. B: Basic Research
DOI: 10.1002/pssb.201552129

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