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Contact Resistivity of Evaporated Al Contacts for Silicon Solar Cells

Fong, Kean; Kho, Teng; Fell, Andreas; Franklin, Evan; Zin, Ngwe Soe; McIntosh, Keith; Ratcliff, Thomas; Stocks, Matthew; Bullock, James; Wang, Er-Chien (Eric); Blakers, Andrew


The contact resistivity of evaporated Al on doped silicon is examined for a range of process conditions common to the fabrication of laboratory silicon solar cells. The effects of silicon surface preparation prior to evaporation, sintering temperature, the use of a shutter, and evaporation power are investigated. The presented evaporation conditions yielded the lowest published contact resistivity between Al-and phosphorus-doped Si over a large range of doping concentration. It is also...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
Source: IEEE Journal of Photovoltaics
DOI: 10.1109/JPHOTOV.2015.2438643


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