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RF compensation of double Langmuir probes: modelling and experiment

Caneses, Juan; Blackwell, Boyd

Description

An analytical model describing the physics of driven floating probes has been developed to model the RF compensation of the double langmuir probe (DLP) technique. The model is based on the theory of the RF self-bias effect as described in Braithwaite's work [1], which we extend to include time-resolved behaviour. The main contribution of this work is to allow quantitative determination of the intrinsic RF compensation of a DLP in a given RF discharge. Using these ideas, we discuss the design of...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
URI: http://hdl.handle.net/1885/103192
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/24/3/035024

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