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Simulation and suppression of the gas phase pre-reaction in metal-organic chemical vapor deposition of ZnO

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Zhu, Guangyao; Gu, Shulin; Zhu, Shunming; Tang, Kun; Ye, Jiandong; Zhang, Rong; Yi, Shi; Zheng, Youdou

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The reaction mechanism and simulations of the metal-organic chemical vapor deposition reactor for ZnO film growth are presented, indicating the temperature of the reaction species. The gas phase pre-reaction can be modulated by several factors or conditions. Simulations verify the relationships between temperature and pyrolysis of precursors, and further reveal that the substrate temperature and flow rate of cooling water have great impacts on the temperature distribution. The experimental...[Show more]

dc.contributor.authorZhu, Guangyao
dc.contributor.authorGu, Shulin
dc.contributor.authorZhu, Shunming
dc.contributor.authorTang, Kun
dc.contributor.authorYe, Jiandong
dc.contributor.authorZhang, Rong
dc.contributor.authorYi, Shi
dc.contributor.authorZheng, Youdou
dc.date.accessioned2016-06-14T23:19:18Z
dc.identifier.issn0256-307X
dc.identifier.urihttp://hdl.handle.net/1885/102836
dc.description.abstractThe reaction mechanism and simulations of the metal-organic chemical vapor deposition reactor for ZnO film growth are presented, indicating the temperature of the reaction species. The gas phase pre-reaction can be modulated by several factors or conditions. Simulations verify the relationships between temperature and pyrolysis of precursors, and further reveal that the substrate temperature and flow rate of cooling water have great impacts on the temperature distribution. The experimental results agree with the simulations.
dc.publisherChinese Academy of Sciences
dc.sourceChinese Physics Letters
dc.titleSimulation and suppression of the gas phase pre-reaction in metal-organic chemical vapor deposition of ZnO
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume28
dc.date.issued2011
local.identifier.absfor010000 - MATHEMATICAL SCIENCES
local.identifier.ariespublicationf5625xPUB7505
local.type.statusPublished Version
local.contributor.affiliationZhu, Guangyao, Nanjing University
local.contributor.affiliationGu, Shulin, Nanjing University
local.contributor.affiliationZhu, Shunming, Nanjing University
local.contributor.affiliationTang, Kun, Nanjing University
local.contributor.affiliationYe, Jiandong, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationZhang, Rong, Nanjing University
local.contributor.affiliationYi, Shi, Nanjing University
local.contributor.affiliationZheng, Youdou, Nanjing University
local.description.embargo2037-12-31
local.bibliographicCitation.issue11
local.bibliographicCitation.startpage1
local.bibliographicCitation.lastpage4
local.identifier.doi10.1088/0256-307X/28/11/116803
dc.date.updated2016-06-14T08:36:49Z
local.identifier.scopusID2-s2.0-82055193328
CollectionsANU Research Publications

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