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Influence of thermally diffused aluminum atoms from sapphire substrate on the properties of ZnO epilayers grown by metal-organic chemical vapor deposition

Tang, Kun; Gu, Shulin; Li, Shuzhen; Ye, Jiandong; Zhu, Shunming; Chen, Hui; Liu, Jiagao; Zhang, Rong; Shi, Yi; Zheng, Youdou


In this study, the authors investigate the evolution of the structural and electrical properties of ZnO epilayers grown by the metal-organic chemical vapor deposition method on c -sapphire substrates. The inserting of a low-temperature ZnO buffer layer not only significantly improves the structural quality of the high-temperature (HT)-grown ZnO epilayer on a sapphire substrate but also results in high background electron concentration in it from the Hall-effect measurement. After subtracting...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: Journal of Vacuum Science and Technology A
DOI: 10.1116/1.3549136


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