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Effect of low energy implantation on the properties of Ti/Ni/Au contacts to n-SiC

Leech, Patrick W; Holland, A S; Reeves, G K; Pan, Yue; Ridgway, Mark C; Tanner, Phillip


The effect of low energy implantation of P or C ions in 3C-SiC on the properties of Ti/Ni/Au contacts has been examined for doses in the range 1013-1015 ions/cm2. Measurements of specific contact resistance, ρ <inf>c</inf>, were performed using the two-contact circular test structure. The magnitude of ρ<inf>c</inf> for the Ti/Ni/Au contacts on unimplanted SiC was 1.29 × 10-6 Ω.cm2. The value of ρ<inf>c</inf> increased significantly at an implant dose of 1 × 1015 ions/cm2. The dependence of...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Conference paper
Source: Materials Research Society Symposium Proceedings
DOI: 10.1557/opl.2015.284


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