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Characterization of ion track morphology formed by swift heavy ion irradiation in silicon oxynitride films

Santiago, Pablo; Schauries, Daniel; Nadzri, Allina; Vora, Kaushal; Ridgway, Mark C; Kluth, Patrick


Amorphous silicon oxynitride (SiO<inf>x</inf>N<inf>y</inf>) possess interesting optical and mechanical properties. Here, we present direct evidence for the formation of ion tracks in 1 μm thick silicon oxynitride of different stoichiometries. The tracks were created by irradiation with 185 MeV Au13+ ions. The samples were studied using spectral reflectometry and Rutherford backscattering spectrometry (RBS), with the track morphology characterised by means of small angle X-ray scattering (SAXS)....[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Conference paper
Source: EPJ Web of Conferences
DOI: 10.1051/epjconf/20159100008
Access Rights: Open Access


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