Characterization of ion track morphology formed by swift heavy ion irradiation in silicon oxynitride films
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Santiago, Pablo; Schauries, Daniel; Nadzri, Allina; Vora, Kaushal; Ridgway, Mark C; Kluth, Patrick
Description
Amorphous silicon oxynitride (SiO<inf>x</inf>N<inf>y</inf>) possess interesting optical and mechanical properties. Here, we present direct evidence for the formation of ion tracks in 1 μm thick silicon oxynitride of different stoichiometries. The tracks were created by irradiation with 185 MeV Au13+ ions. The samples were studied using spectral reflectometry and Rutherford backscattering spectrometry (RBS), with the track morphology characterised by means of small angle X-ray scattering (SAXS)....[Show more]
Collections | ANU Research Publications |
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Date published: | 2015 |
Type: | Conference paper |
URI: | http://hdl.handle.net/1885/102659 |
Source: | EPJ Web of Conferences |
DOI: | 10.1051/epjconf/20159100008 |
Access Rights: | Open Access |
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01_Santiago_Characterization_of_ion_track_2015.pdf | 1.29 MB | Adobe PDF |
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