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Nanoporous silicon produced by metal-assisted etching: A detailed investigation of optical and contact properties for solar cells

Chong, Teck; Bullock, James; White, Thomas; Berry, Martin; Weber, Klaus


We present a detailed investigation of the optical and contact quality of silicon wafers textured using metal-assisted etching (MAE) to produce a nanoporous silicon (nSi) surface. We show that the solar weighted reflectance (Rw) of the bare optimized MAE nSi structure is only ∼8%, and this is further reduced to 3% with the addition of an Al2O3/TiO2 stack. We also show that the optical path length enhancement can be >20 near the band edge of Si. The contact resistivity measurements of...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
Source: IEEE Journal of Photovoltaics
DOI: 10.1109/JPHOTOV.2015.2392937


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