Digitally enhanced heterodyne interferometry
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Description
Combining conventional interferometry with digital modulation allows interferometric signals to be isolated based on their delay. This isolation capability can be exploited in two ways. First, it can improve measurement sensitivity by reducing contamination by spurious interference. Second, it allows multiple optical components to be measured using a single metrology system. Digitally enhanced interferometry employs a pseudorandom noise (PRN) code phase modulated onto the light source....[Show more]
Collections | ANU Research Publications |
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Date published: | 2007-11-15 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/101795 |
Source: | Optics Letters |
DOI: | 10.1364/OL.32.003355 |
Access Rights: | Open Access |
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