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Digitally enhanced heterodyne interferometry

Shaddock, Daniel A.

Description

Combining conventional interferometry with digital modulation allows interferometric signals to be isolated based on their delay. This isolation capability can be exploited in two ways. First, it can improve measurement sensitivity by reducing contamination by spurious interference. Second, it allows multiple optical components to be measured using a single metrology system. Digitally enhanced interferometry employs a pseudorandom noise (PRN) code phase modulated onto the light source....[Show more]

dc.contributor.authorShaddock, Daniel A.
dc.date.accessioned2016-05-31T02:36:06Z
dc.date.available2016-05-31T02:36:06Z
dc.identifier.issn0146-9592
dc.identifier.urihttp://hdl.handle.net/1885/101795
dc.description.abstractCombining conventional interferometry with digital modulation allows interferometric signals to be isolated based on their delay. This isolation capability can be exploited in two ways. First, it can improve measurement sensitivity by reducing contamination by spurious interference. Second, it allows multiple optical components to be measured using a single metrology system. Digitally enhanced interferometry employs a pseudorandom noise (PRN) code phase modulated onto the light source. Individual reflections are isolated based on their respective delays by demodulation with the PRN code with a matching delay. The properties of the PRN code determine the degree of isolation while preserving the full interferometric sensitivity determined by the optical wavelength. Analysis and simulation indicate that errors caused by spurious interference can be reduced by a factor inversely proportional to the PRN code length.
dc.format3 pages
dc.publisherOptical Society of America
dc.rights© 2007 Optical Society of America
dc.sourceOptics Letters
dc.subjectinterferometry
dc.subjectdigital
dc.subjectmodulation
dc.subjectinterferometric
dc.subjectsignal
dc.subjectisolation
dc.subjectmeasurement
dc.subjectsensitivity
dc.subjectcontamination
dc.subjectmetrology
dc.subjectsingle
dc.subjectpseudorandom noise (PRN)
dc.titleDigitally enhanced heterodyne interferometry
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume32
dcterms.dateAccepted2007-10-08
dc.date.issued2007-11-15
local.identifier.absfor020501
local.identifier.ariespublicationu4133361xPUB165
local.publisher.urlhttp://www.osa.org/
local.type.statusPublished Version
local.contributor.affiliationShaddock, Daniel, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Quantum Science, The Australian National University
local.identifier.essn1539-4794
local.bibliographicCitation.issue22
local.bibliographicCitation.startpage3355
local.bibliographicCitation.lastpage3357
local.identifier.doi10.1364/OL.32.003355
dcterms.accessRightsOpen Access
CollectionsANU Research Publications

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