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Digitally enhanced heterodyne interferometry

Shaddock, Daniel A.

Description

Combining conventional interferometry with digital modulation allows interferometric signals to be isolated based on their delay. This isolation capability can be exploited in two ways. First, it can improve measurement sensitivity by reducing contamination by spurious interference. Second, it allows multiple optical components to be measured using a single metrology system. Digitally enhanced interferometry employs a pseudorandom noise (PRN) code phase modulated onto the light source....[Show more]

CollectionsANU Research Publications
Date published: 2007-11-15
Type: Journal article
URI: http://hdl.handle.net/1885/101795
Source: Optics Letters
DOI: 10.1364/OL.32.003355

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