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Low-cost scheme for high-precision dual-wavelength laser metrology

Kok, Yitping; Ireland, Michael; Robertson, J Gordon; Tuthill, Peter G; Warrington, Benjamin A; Tango, William J

Description

A method capable of delivering relative optical path length metrology with nanometer precision is demonstrated. Unlike conventional dual-wavelength metrology, which employs heterodyne detection, the method developed in this work utilizes direct detection of interference fringes of two He-Ne lasers as well as a less precise stepper motor open-loop position control system to perform its measurement. Although the method may be applicable to a variety of circumstances, the specific application in...[Show more]

CollectionsANU Research Publications
Date published: 2013-04-20
Type: Journal article
URI: http://hdl.handle.net/1885/101720
Source: Applied optics
DOI: 10.1364/AO.52.002808

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