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GaAs nanopillar arrays with suppressed broadband reflectance and high optical quality for photovoltaic applications

Sanatinia, R.; Awan, K. M.; Naureen, S.; Anttu, N.; Ebraert, E.; Anand, S.


We report on fabrication and optical characterization of GaAs nanopillar (NP) arrays, obtained using a combination of low-cost mask generation by self-assembled silica particles (nanosphere lithography) and dry etching. Tapered structures (conical and frustum NP arrays) are fabricated by appropriate optimization of process parameters. Significant suppression of surface reflectance is observed for both geometries over a broad wavelength range. Simulations, based on finite difference time domain...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Optical Materials Express
DOI: 10.1364/OME.2.001671


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