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Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography

Han, Ting; Madden, Steve; Bulla, Douglas; Luther-Davies, Barry


We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2-4 µm wide and 1 µm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550 nm.

CollectionsANU Research Publications
Date published: 2010-08-30
Type: Journal article
Source: Optics express
DOI: 10.1364/OE.18.019286


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