Deposition and Characterization of Silica-Based Films by Helicon-Activated Reactive Evaporation Applied to Optical Waveguide Fabrication
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Bulla, Douglas; Li, Wei-Tang; Charles, Christine; Boswell, Rod; Ankiewicz, Adrian; Love, John
Description
Planar silicon dioxide optical waveguides were deposited by use of a plasma-activated reactive evaporation system, at a low deposition temperature and with reduced hydrogen contamination, on thermally oxidized silicon wafers. The deposited films show a refractive-index inhomogeneity of less than 0.1%, a thickness nonuniformity of less than 5%, and a material birefringence of approximately 5 × 10-4. Rib-type channel waveguides were formed on the deposited films by means of hydrofluoric acid...[Show more]
dc.contributor.author | Bulla, Douglas | |
---|---|---|
dc.contributor.author | Li, Wei-Tang | |
dc.contributor.author | Charles, Christine | |
dc.contributor.author | Boswell, Rod | |
dc.contributor.author | Ankiewicz, Adrian | |
dc.contributor.author | Love, John | |
dc.date.accessioned | 2016-05-23T01:19:54Z | |
dc.date.available | 2016-05-23T01:19:54Z | |
dc.identifier.issn | 0003-6935 | |
dc.identifier.uri | http://hdl.handle.net/1885/101500 | |
dc.description.abstract | Planar silicon dioxide optical waveguides were deposited by use of a plasma-activated reactive evaporation system, at a low deposition temperature and with reduced hydrogen contamination, on thermally oxidized silicon wafers. The deposited films show a refractive-index inhomogeneity of less than 0.1%, a thickness nonuniformity of less than 5%, and a material birefringence of approximately 5 × 10-4. Rib-type channel waveguides were formed on the deposited films by means of hydrofluoric acid etching. The transmission loss of the rib waveguides is determined to be as low as 0.3 dB/cm at a wavelength of 1310 nm for TE polarization, after subtraction of the calculated leakage and scattering losses. Owing to the presence of the OH vibrational overtone band, an additional loss peak of 1 dB/cm is found near the 1385-nm wavelength. The experimental results of transmission loss at wavelengths of 1310 and 1550 nm are compared with analytic expressions for interface scattering and leakage loss. | |
dc.publisher | Optical Society of America | |
dc.rights | © 2004 Optical Society of America | |
dc.source | Applied Optics | |
dc.subject | Keywords: Reactive evaporation; Rib waveguides; Thermal postdeposition; Band structure; Contamination; Evaporation; Interfaces (materials); Light polarization; Light scattering; Optical waveguides; Refractive index; Silica; Optical films | |
dc.title | Deposition and Characterization of Silica-Based Films by Helicon-Activated Reactive Evaporation Applied to Optical Waveguide Fabrication | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.citationvolume | 43 | |
dc.date.issued | 2004 | |
local.identifier.absfor | 020501 | |
local.identifier.ariespublication | MigratedxPub8977 | |
local.publisher.url | http://www.osa.org/en-us/home/ | |
local.type.status | Published Version | |
local.contributor.affiliation | Bulla, Douglas, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Theoretical Physics, The Australian National University | |
local.contributor.affiliation | Li, Wei, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Laser Physics Centre, The Australian National University | |
local.contributor.affiliation | Charles, Christine, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Plasma Research Laboratory, The Australian National University | |
local.contributor.affiliation | Boswell, Roderick, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Plasma Research Laboratory, The Australian National University | |
local.contributor.affiliation | Ankiewicz, Adrian, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Theoretical Physics, The Australian National University | |
local.contributor.affiliation | Love, John, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Theoretical Physics, The Australian National University | |
local.bibliographicCitation.issue | 14 | |
local.bibliographicCitation.startpage | 2978 | |
local.bibliographicCitation.lastpage | 2985 | |
local.identifier.doi | 10.1364/AO.43.002978 | |
dc.date.updated | 2016-06-14T08:37:32Z | |
local.identifier.scopusID | 2-s2.0-2542448131 | |
Collections | ANU Research Publications |
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