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Spectral tuning of a three-dimensional photonic-bandgap waveguide signature by silica atomic-layer deposition

Staude, Isabelle; von Freymann, Georg; Wegener, Martin


Recent progress in three-dimensional sub-micron fabrication has rendered the introduction of waveguide structures into optical three-dimensional photonic bandgap materials possible. However, spectral tuning of the waveguide modes has not been demonstrated so far. Here, we use atomic-layer deposition of amorphous silica to tune the spectral position of an air-core defect waveguide in a three-dimensional silicon woodpile photonic crystal by 225 nm in wavelength. The measured spectral positions of...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Optical Materials Express
DOI: 10.1364/OME.2.000629


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