Silica-embedded silicon photonic crystal waveguides
We report on the fabrication and characterization of silicon photonic crystal waveguides completely embedded in silica. These waveguides offer a robust alternative to air-membranes and are fully compatible with monolithic integration. Despite the reduced refractive index contrast compared to the air-membranes, these waveguides offer a considerable operating range of ≈10 nm in the 1550 nm window. While the reduced index contrast weakens the perturbations due to surface roughness, we measure...[Show more]
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