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The indentation hardness of silicon measured by instrumented indentation: What does it mean?

Haberl, Bianca; Bayu Aji, Leonardus Bimo; Williams, J. S.; Bradby, Jodie E.


The indentation hardness of three different pure forms of silicon was investigated by two different methods. The hardness was probed by direct imaging of the residual impressions and by instrumented indentation using the Oliver–Pharr method. The forms of silicon used were a defective form of amorphous silicon, an amorphous form close to a continuous random network, and a crystalline silicon. The first form deforms via plastic flow and the latter two via phase transition. Two different...[Show more]

CollectionsANU Research Publications
Date published: 2012-12-28
Type: Journal article
Source: Journal of Materials Research
DOI: 10.1557/jmr.2012.389


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