In-situ electrical probing of zones of nanoindentation-induced phases of silicon
Phase transformed zones of silicon have been formed by nanoindentation both at the micro- and nanoscale and electrically probed using an in-situ measurement system. Zones composed of the high pressure crystalline phases (Si-III/Si-XII) have higher conductivity than those of amorphous silicon (a-Si). At the microscale probing laterally across the surface shows that the conductivity varies within the zones composed of the high pressure phases. The sensitivity to the different conductivities of...[Show more]
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