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In-situ electrical probing of zones of nanoindentation-induced phases of silicon

Ruffell, Simon; Bradby, Jodie; Williams, Jim; Major, Ryan; Warren, Oden


Phase transformed zones of silicon have been formed by nanoindentation both at the micro- and nanoscale and electrically probed using an in-situ measurement system. Zones composed of the high pressure crystalline phases (Si-III/Si-XII) have higher conductivity than those of amorphous silicon (a-Si). At the microscale probing laterally across the surface shows that the conductivity varies within the zones composed of the high pressure phases. The sensitivity to the different conductivities of...[Show more]

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: MRS Proceedings
DOI: 10.1557/PROC-1146-NN02-06


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