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The Role of Oxygen on the Stability of Gettering of Metals to Cavities in Silicon

Author(s)Williams, James; Conway, Martin; Wong-Leung, Yin-Yin (Jennifer); Deenapanray, Prakash; Petravic, Mladen; Brown, Richard Alan; Eaglesham, D; Jacobson, D
TypeJournal article
Date Published1999
Date Created-
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