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The Role of Fe on the Crystallisation of a-Si3N4 from Amorphous Si-N Formed by Ion Implantation

Author(s)Li, Zheng Feng; Wong-Leung, Yin-Yin (Jennifer); Deenapanray, Prakash; Conway, Martin; Chivers, D; Fitz Gerald, John; Williams, James
TypeJournal article
Date Published1999
Date Created-
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