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Nano-phase separation of Arsenic Tri-sulphide (As 2 S 3 ) film and its effect on Plasma Etching

Author(s)Madden, Steve; Wang, Rongping; Rode, Andrei V; Krolikowska, Maryla; Luther-Davies, Barry; Choi, Duk-Yong
TypeJournal article
Date Published2007
Date Created-
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Updated:  19 May 2016/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator