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Correlating properties of PECVD SiNx layers to deposition parameters

Author(s)Vora, Kaushal; Belay, Kidane; Pyke, Daniel; Karouta, Fouad; Jagadish, Chennupati
TypeConference paper
Date Published2010
Date CreatedDecember 12-15 2010

Structural, Compositional and Optical properties of PECVD silicon nitride layers

Author(s)Karouta, Fouad; Vora, Kaushal; Tian, Jie; Jagadish, Chennupati
TypeJournal article
Date Published2012
Date Created-

Ion Mass Effect on Vacancy-Related Deep Levels in Si Induced by Ion Implantation

Author(s)Monakhov, E V; Wong-Leung, Yin-Yin (Jennifer); Kuznetsov, A Yu; Jagadish, Chennupati; Svensson, Bengt Gunnar
TypeJournal article
Date Published2002
Date Created-

ICP Dry Etching of ZnO and Effects of Hydrogen

Author(s)Ip, K; Overberg, M E; Baik, K W; Wilson, R G; Kucheyev, Sergei; Williams, James; Jagadish, Chennupati; Ren, Fan; Heo, Y W; Norton, D P; Zavada, J M; Pearton, S J
TypeJournal article
Date Published2003
Date Created-

On the Pulsed Anodic Oxidation of n + -InP

Author(s)Deenapanray, Prakash; Martin, Anthony H; Lever McGowan, Penelope; Jagadish, Chennupati
TypeJournal article
Date Published2002
Date Created-

Wavelength selective filter based on polarization control in a photonic bandgap structure with a defect

Author(s)Andres-Arroyo, Ana; Reece, Peter; Johnson, Craig M; Vora, Kaushal; Karouta, Fouad; Jagadish, Chennupati
TypeJournal article
Date Published2011
Date Created-

Transmission Electron Microscopy Characterization of Secondary Defects Created by MeV Si, Ge, and Sn Implantation in Silicon

Author(s)Wong-Leung, Yin-Yin (Jennifer); Fatima, S; Jagadish, Chennupati; Fitz Gerald, John; Chou, C; Zou, Jin; Cockayne, David John Hugh
TypeJournal article
Date Published2000
Date Created-

Separation of Vacancy and Interstitial Depth Profiles in Proton- and Boron-Implanted Silicon

Author(s)Pellegrino, P; Leveque, P; Kortegaard-Nielsen, H; Hallen, A; Wong-Leung, Yin-Yin (Jennifer); Jagadish, Chennupati; Svensson, Bengt Gunnar
TypeJournal article
Date Published2002
Date Created-

Recent advances in semiconductor nanowire heterostructures

Author(s)Jackson, H. E.; Smith, L. M.; Jagadish, Chennupati
TypeJournal article
Date Published2014
Date Created-

Computation of the modal reflectivity for a partially etched mirror: application for integration of a laser diode and a waveguide

Author(s)Buda, Manuela; Jagadish, Chennupati
TypeJournal article
Date Published2005
Date Created-

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