Very low loss reactively ion etched Tellurium Dioxide planar rib waveguides for linear and non-linear optics
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Description
We report on the fabrication and optical properties of the first very low loss nonlinear Tellurite planar rib waveguides ever demonstrated. A new reactive ion etch process based on Hydrogen as the active species was developed to accomplish the low propagation losses. Optical losses below ~0.05dB/cm in most of the NIR spectrum and ~0.10dB/cm at 1550nm have been achieved - the lowest ever reported by more than an order of magnitude and clearly suitable for planar integrated devices. We...[Show more]
Collections | ANU Research Publications |
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Date published: | 2009-09-17 |
Type: | Journal article |
URI: | http://hdl.handle.net/10440/993 http://digitalcollections.anu.edu.au/handle/10440/993 |
Source: | Optics Express |
DOI: | 10.1364/OE.17.017645 |
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File | Description | Size | Format | Image |
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Madden_Very2009.pdf | 300.23 kB | Adobe PDF |
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