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Very low loss reactively ion etched Tellurium Dioxide planar rib waveguides for linear and non-linear optics

Madden, Steve; Vu, K


We report on the fabrication and optical properties of the first very low loss nonlinear Tellurite planar rib waveguides ever demonstrated. A new reactive ion etch process based on Hydrogen as the active species was developed to accomplish the low propagation losses. Optical losses below ~0.05dB/cm in most of the NIR spectrum and ~0.10dB/cm at 1550nm have been achieved - the lowest ever reported by more than an order of magnitude and clearly suitable for planar integrated devices. We...[Show more]

CollectionsANU Research Publications
Date published: 2009-09-17
Type: Journal article
Source: Optics Express
DOI: 10.1364/OE.17.017645


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