Integrated shadow mask for sampled Bragg gratings in chalcogenide (As2S3) planar waveguides
We have developed a new approach for producing high performance sampled Bragg gratings in planar waveguides as a platform for WDM on-chip signal processing in a compact integrated device. Using this method we have successfully integrated a shadow mask directly onto a chalcogenide (As2S3) waveguide using standard semiconductor processing, eliminating misalignment errors between the mask and waveguide that otherwise occur. Through this integrated mask we demonstrate a very low duty cycle...[Show more]
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