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Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

Ruan, Yinlan; Li, Wei; Jarvis, Ruth; Madsen, Nathan; Rode, Andrei V; Luther-Davies, Barry


We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Δn ~ 1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of ~ 100 times silica in As2S3 allowed observation of a Д phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.

CollectionsANU Research Publications
Date published: 2004-10-18
Type: Journal article
Source: Optics Express
DOI: 10.1364/OPEX.12.005140


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