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Characterization of deep level traps responsible for isolation of proton implanted GaAs

Boudinov, H; Coelho, A V P; Jagadish, Chennupati; Tan, Hark Hoe


Deep level transient spectroscopy was employed to determine the electrical properties of defects induced in metalorganic chemical-vapor deposition grown n-type and p-type GaAs during proton bombardment. Thermal stability of these defects was investigated and correlation with defects responsible for isolation of GaAs by ion bombardment was discussed. The annealing temperature region (220–250 °C) is similar to proton isolated GaAs below the threshold dose for complete isolation. At least four of...[Show more]

CollectionsANU Research Publications
Date published: 2003-03-15
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.1554761


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