Picometer level displacement metrology with digitally enhanced heterodyne interferometry
Digitally enhanced heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier. We present the first characterization of the technique’s displacement sensitivity. The displacement of an optical cavity was measured using digitally enhanced heterodyne interferometry and compared to a simultaneous readout based on conventional Pound-Drever-Hall locking. The techniques agreed to within 5 pm/√Hz at 1 Hz, providing an...[Show more]
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